Selective growth of carbon nanotube for via interconnects by oxidation and selective reduction of catalyst

Published 2008 View Full Article

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Title
Selective growth of carbon nanotube for via interconnects by oxidation and selective reduction of catalyst
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 18, Pages 182106
Publisher
AIP Publishing
Online
2008-11-06
DOI
10.1063/1.3021363

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