4.6 Article

Microwave-excited atmospheric-pressure plasma jets using a microstrip line

Journal

APPLIED PHYSICS LETTERS
Volume 93, Issue 19, Pages -

Publisher

AMER INST PHYSICS
DOI: 10.1063/1.3025841

Keywords

finite difference time-domain analysis; nozzles; plasma jets; plasma simulation; visible spectra

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We report a 2.45 GHz microwave-excited atmospheric-pressure plasma jet (MW-APPJ) device using a microstrip line for materials processing. A three-dimensional simulation based on the finite difference time domain method revealed that the configuration of the MW-APPJ device results in a strong concentration of electric fields at the gas nozzle. Argon plasmas were generated at the nozzle and were blown into ambient air with the maximum length of 5 mm at a microwave power of 40 W. The rotational temperatures of molecular nitrogen in the downstream of the plasma jets, measured by optical emission spectroscopy, were 1720 to 900 K for gas flow rates from 0.5 to 3.5 l/min, indicating that the jets were nonthermal plasmas. This MW-APPJ device will provide a large-area APPJ for materials processing depending on the configuration of the nozzle array and microstrip lines.

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