Internal gettering of iron in multicrystalline silicon at low temperature

Published 2008 View Full Article

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Title
Internal gettering of iron in multicrystalline silicon at low temperature
Authors
Keywords
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Journal
APPLIED PHYSICS LETTERS
Volume 93, Issue 15, Pages 152108
Publisher
AIP Publishing
Online
2008-10-18
DOI
10.1063/1.2987521
References
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