On the role of surface tensions and process conditions in detachment nanolithography

Published 2008 View Full Article

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Title
On the role of surface tensions and process conditions in detachment nanolithography
Authors
Keywords
-
Journal
APPLIED PHYSICS LETTERS
Volume 92, Issue 22, Pages 223107
Publisher
AIP Publishing
Online
2008-06-04
DOI
10.1063/1.2937143

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