Layer-by-layer growth of ε-Ga2O3 thin film by metal–organic chemical vapor deposition

Published 2018 View Full Article

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Title
Layer-by-layer growth of ε-Ga2O3 thin film by metal–organic chemical vapor deposition
Authors
Keywords
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Journal
Applied Physics Express
Volume 11, Issue 10, Pages 101101
Publisher
Japan Society of Applied Physics
Online
2018-08-29
DOI
10.7567/apex.11.101101

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