Passive–active oxidation boundary for thermal oxidation of 4H-SiC(0001) surface in O2/Ar gas mixture and its impact on SiO2/SiC interface quality

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Title
Passive–active oxidation boundary for thermal oxidation of 4H-SiC(0001) surface in O2/Ar gas mixture and its impact on SiO2/SiC interface quality
Authors
Keywords
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Journal
Applied Physics Express
Volume 11, Issue 9, Pages 091301
Publisher
Japan Society of Applied Physics
Online
2018-08-02
DOI
10.7567/apex.11.091301

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