4.5 Article

P-type ZnO thin-film transistors and passivation using photoelectrochemical oxidation method

Journal

APPLIED PHYSICS EXPRESS
Volume 7, Issue 7, Pages -

Publisher

IOP PUBLISHING LTD
DOI: 10.7567/APEX.7.076502

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Funding

  1. Advanced Optoelectronic Technology Center of the National Cheng Kung University
  2. Ministry of Science and Technology of Taiwan, Republic of China [NSC 102-2221-E006-283]

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A high-performance stable i-ZnO buffer layer and p-ZnO channel layer for p-ZnO thin-film transistors (TFTs) were deposited using vapor cooling condensation. The resulting p-ZnO TFTs had a transconductance of 1.87 x 10(-6) S, saturation drain-source current of -14.1 mu A, and field-effect mobility of 7.12 cm(2) s(-1). To improve the performance, the channel layer was passivated using photoelectrochemical oxidation. The transconductance, saturation drain-source current, and field-effect mobility of the passivated TFTs were improved to 2.05 x 10(-6) S, -16.0 mu A, and 7.83 cm(2)V(-1)s(-1), respectively. The performance improvement was attributed to the reduced interface state density obtained by passivation. (C) 2014 The Japan Society of Applied Physics

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