Electron Mobility Degradation and Interface Dipole Formation in Direct-Contact HfO$_{2}$/Si Metal–Oxide–Semiconductor Field-Effect Transistors

Title
Electron Mobility Degradation and Interface Dipole Formation in Direct-Contact HfO$_{2}$/Si Metal–Oxide–Semiconductor Field-Effect Transistors
Authors
Keywords
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Journal
Applied Physics Express
Volume 4, Issue 10, Pages 101101
Publisher
IOP Publishing
Online
2011-10-05
DOI
10.1143/apex.4.101101

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