Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas

Published 2011 View Full Article

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Title
Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas
Authors
Keywords
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Journal
Applied Physics Express
Volume 4, Issue 6, Pages 066101
Publisher
IOP Publishing
Online
2011-05-26
DOI
10.1143/apex.4.066101
References
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