Self-Separation of a Thick AlN Layer from a Sapphire Substrate via Interfacial Voids Formed by the Decomposition of Sapphire

Published 2008 View Full Article

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Title
Self-Separation of a Thick AlN Layer from a Sapphire Substrate via Interfacial Voids Formed by the Decomposition of Sapphire
Authors
Keywords
-
Journal
Applied Physics Express
Volume 1, Issue -, Pages 045003
Publisher
IOP Publishing
Online
2008-04-11
DOI
10.1143/apex.1.045003

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