Quantitative Evaluation of Silicon Displacement Induced by Arsenic Implantation Using Silicon Isotope Superlattices

Published 2008 View Full Article

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Title
Quantitative Evaluation of Silicon Displacement Induced by Arsenic Implantation Using Silicon Isotope Superlattices
Authors
Keywords
-
Journal
Applied Physics Express
Volume 1, Issue -, Pages 021401
Publisher
IOP Publishing
Online
2008-01-25
DOI
10.1143/apex.1.021401

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