Performance analysis of coherent optical scatterometry

Published 2011 View Full Article

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Title
Performance analysis of coherent optical scatterometry
Authors
Keywords
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Journal
APPLIED PHYSICS B-LASERS AND OPTICS
Volume 105, Issue 4, Pages 775-781
Publisher
Springer Nature
Online
2011-11-11
DOI
10.1007/s00340-011-4794-7
References
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