Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications

Published 2010 View Full Article

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Title
Effect of etching parameters on antireflection properties of Si subwavelength grating structures for solar cell applications
Authors
Keywords
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Journal
APPLIED PHYSICS B-LASERS AND OPTICS
Volume 100, Issue 4, Pages 891-896
Publisher
Springer Nature
Online
2010-07-12
DOI
10.1007/s00340-010-4128-1
References
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