Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher

Published 2014 View Full Article

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Title
Corrective finishing of extreme ultraviolet photomask blanks by precessed bonnet polisher
Authors
Keywords
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Journal
APPLIED OPTICS
Volume 53, Issue 14, Pages 3075
Publisher
The Optical Society
Online
2014-05-07
DOI
10.1364/ao.53.003075
References
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