Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

Published 2013 View Full Article

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Title
Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor
Authors
Keywords
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Journal
APPLIED OPTICS
Volume 52, Issue 14, Pages 3279
Publisher
The Optical Society
Online
2013-05-07
DOI
10.1364/ao.52.003279
References
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