Thermal expansion coefficient and thermomechanical properties of SiNx thin films prepared by plasma-enhanced chemical vapor deposition

Title
Thermal expansion coefficient and thermomechanical properties of SiNx thin films prepared by plasma-enhanced chemical vapor deposition
Authors
Keywords
-
Journal
APPLIED OPTICS
Volume 51, Issue 30, Pages 7229
Publisher
The Optical Society
Online
2012-10-13
DOI
10.1364/ao.51.007229

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