Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors

Published 2012 View Full Article

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Title
Structural properties of subnanometer thick Y layers in extreme ultraviolet multilayer mirrors
Authors
Keywords
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Journal
APPLIED OPTICS
Volume 51, Issue 36, Pages 8541
Publisher
The Optical Society
Online
2012-12-12
DOI
10.1364/ao.51.008541
References
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