On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes

Published 2015 View Full Article

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Title
On the Control of the Fixed Charge Densities in Al2O3-Based Silicon Surface Passivation Schemes
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 7, Issue 51, Pages 28215-28222
Publisher
American Chemical Society (ACS)
Online
2015-12-01
DOI
10.1021/acsami.5b06606

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