Journal
ANALYTICAL AND BIOANALYTICAL CHEMISTRY
Volume 395, Issue 3, Pages 559-575Publisher
SPRINGER HEIDELBERG
DOI: 10.1007/s00216-009-3011-6
Keywords
Plasma; Discharge; Chemical; Radiation; Pressure
Funding
- National Science Foundation
- Sea Grant Institute
- Water Resources Institute
- IR/D
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This paper describes the use of microdischarges as transducing elements in sensors and detectors. Chemical and physical sensing of gases, chemical sensing of liquids, and radiation detection are described. These applications are explored from the perspective of their use in portable microsystems, with emphasis on compactness, power consumption, the ability to operate at or near atmospheric pressure (to reduce pumping challenges), and the ability to operate in an air ambient (to reduce the need for reservoirs of carrier gases). Manufacturing methods and performance results are described for selected examples.
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