An integrated solid-state solution for secondary electron detection

Published 2013 View Full Article

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Title
An integrated solid-state solution for secondary electron detection
Authors
Keywords
Multi-pixel, CMOS, Photon detector, Secondary electron detection, Scanning electron microscope
Journal
ANALOG INTEGRATED CIRCUITS AND SIGNAL PROCESSING
Volume 79, Issue 2, Pages 395-411
Publisher
Springer Nature
Online
2013-11-23
DOI
10.1007/s10470-013-0234-4
References
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