Fabrication of Thermo-Pneumatic Driven Microactuator for Fluid Transport Applications

Published 2013 View Full Article

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Title
Fabrication of Thermo-Pneumatic Driven Microactuator for Fluid Transport Applications
Authors
Keywords
-
Journal
Volume 19, Issue 10, Pages 2854-2859
Publisher
American Scientific Publishers
Online
2013-04-15
DOI
10.1166/asl.2013.5103

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