Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials
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Title
Programmable Mechanical Resonances in MEMS by Localized Joule Heating of Phase Change Materials
Authors
Keywords
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Journal
ADVANCED MATERIALS
Volume 25, Issue 44, Pages 6430-6435
Publisher
Wiley
Online
2013-08-27
DOI
10.1002/adma.201302087
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