4.8 Article

Integrated Carbon Nanotube Array as Dry Adhesive for High-Temperature Silicon Processing

Journal

ADVANCED MATERIALS
Volume 23, Issue 37, Pages 4285-4289

Publisher

WILEY-V C H VERLAG GMBH
DOI: 10.1002/adma.201102331

Keywords

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Funding

  1. Fusion Research Program for Green Technologies [2010-0019088]
  2. Mid-carrer Researcher Program [2010-0027687]
  3. National Research Foundation of Korea (NRF) [2011-0002585]
  4. Ministry of Education, Science and Technology (MEST)

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