Journal
ADVANCED MATERIALS
Volume 23, Issue 19, Pages 2231-+Publisher
WILEY-BLACKWELL
DOI: 10.1002/adma.201100472
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Funding
- Ministry of Education, Science and Technology [2010-0019143, 2010-0015814, 2011-0001672, 2010-0027687]
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A highly reliable micromechanical contact based on aligned carbon nanotube (CNT) arrays is demonstrated and characterized. The CNT arrays are synthesized directly on three-terminal micro-electromechanical systems, and they are adjusted and simultaneously preloaded during the synthetic process, making intimate micromechanical contacts. It is found that the CNT array-to-array contact improves upon conventional solid-to-solid micromechanical contact.
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