Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography

Published 2010 View Full Article

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Title
Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 22, Issue 29, Pages 3171-3175
Publisher
Wiley
Online
2010-06-08
DOI
10.1002/adma.200904153
References
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