4.8 Article

Retrograde Melting and Internal Liquid Gettering in Silicon

Journal

ADVANCED MATERIALS
Volume 22, Issue 35, Pages 3948-+

Publisher

WILEY-BLACKWELL
DOI: 10.1002/adma.200904344

Keywords

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Funding

  1. U.S. Department of Energy [DE-FG36-09GO19001]
  2. Office of Science, Office of Basic Energy Sciences, of the U.S. Department of Energy [DE-AC02-05CH11231, DE-AC02-06CH11357]
  3. National Science Foundation [ECS-0335765]

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Retrograde melting (melting upon cooling) is observed in silicon doped with 3d transition metals, via synchrotron-based temperature-dependent X-ray microprobe measurements. Liquid metal-silicon droplets formed via retrograde melting act as efficient sinks for metal impurities dissolved within the silicon matrix. Cooling results in decomposition of the homogeneous liquid phase into solid multiple-metal alloy precipitates. These phenomena represent a novel pathway for engineering impurities in semiconductor-based systems.

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