Sub-15nm Optical Fiber Nanoimprint Lithography: A Parallel, Self-aligned and Portable Approach

Title
Sub-15nm Optical Fiber Nanoimprint Lithography: A Parallel, Self-aligned and Portable Approach
Authors
Keywords
-
Journal
ADVANCED MATERIALS
Volume 23, Issue 4, Pages 531-535
Publisher
Wiley
Online
2010-11-22
DOI
10.1002/adma.201002796

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