Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization

Title
Pure-Silica-Zeolite MFI and MEL Low-Dielectric-Constant Films with Fluoro-Organic Functionalization
Authors
Keywords
-
Journal
ADVANCED FUNCTIONAL MATERIALS
Volume 18, Issue 21, Pages 3454-3460
Publisher
Wiley
Online
2008-10-21
DOI
10.1002/adfm.200800390

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