Fatigue Damage Behavior of Freestanding 40 µm-Thick Nickel Foils for MEMS Applications

Title
Fatigue Damage Behavior of Freestanding 40 µm-Thick Nickel Foils for MEMS Applications
Authors
Keywords
-
Journal
ADVANCED ENGINEERING MATERIALS
Volume 15, Issue 6, Pages 496-502
Publisher
Wiley
Online
2013-02-16
DOI
10.1002/adem.201200264

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