☆ 4.6 Article

Two- and Three-Dimensional Micro- and Sub-Micrometer Periodic Structures Using Two-Beam Laser Interference Lithography

ADVANCED ENGINEERING MATERIALS (2009)

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Journal

ADVANCED ENGINEERING MATERIALS
Volume 12, Issue 1-2, Pages 54-60

Publisher

Wiley
DOI: 10.1002/adem.200900221

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Categories

Materials Science, Multidisciplinary

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