In-Situ Studies of ALD Growth of Hafnium Oxide Films

Published 2009 View Full Article

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Title
In-Situ Studies of ALD Growth of Hafnium Oxide Films
Authors
Keywords
-
Journal
ADVANCED ENGINEERING MATERIALS
Volume 11, Issue 4, Pages 265-268
Publisher
Wiley
Online
2009-04-08
DOI
10.1002/adem.200800348

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