Review
Chemistry, Multidisciplinary
Paul C. Uzoma, Salman Shabbir, Huan Hu, Paul C. Okonkwo, Oleksiy V. Penkov
Summary: The development of microelectronics has always been driven by reducing transistor size and increasing integration, which requires the photolithography technique for manufacturing transistors to evolve as well. The use of lithography based on beyond extreme ultraviolet radiation (BEUV) with solutions such as periodic multilayer film X-ray mirrors (PMMs) has become crucial for decreasing the working wavelength.
Article
Optics
V. N. Polkovnikov, R. A. Shaposhnikov, S. Yu Zuev, M. Svechnikov, M. G. Sertsu, A. Sokolov, F. Schafers, N. Chkhalo
Summary: The reflective characteristics of multilayer mirrors based on Ru/Y were investigated, revealing a reflection coefficient of 38.5% at an operating wavelength of 9.4 nm. It was found that the deposition of B-4 C barrier layers onto Y layers significantly increases the reflection coefficient compared to structures without barrier layers. Additionally, mirrors optimized for 11.4 nm achieved a reflectance of 54%, which approaches the theoretical limit for these materials.
Article
Chemistry, Physical
Mikhail Mazuritskiy, Alexey T. Kozakov, Niranjan Kumar, Ruslan M. Smertin, Sergei A. Garakhin, Vladimir N. Polkovnikov, Nikolay Chkhalo
Summary: This study investigates multilayer interference structures based on Mo/Si and W/Si using laboratory X-ray micro-fluorescence analysis and statistical analysis. The degree of homogeneity and chemical compositions of the multilayer mirrors are evaluated using X-ray spectroscopy and mathematical statistics. A correlation between the statistical characteristics of bimodal frequency distribution and the reflectivity properties of X-ray mirrors for scattered radiation is revealed.
SURFACES AND INTERFACES
(2022)
Article
Materials Science, Multidisciplinary
Andrey Vorontsov, Andrey Filippov, Nickolay Shamarin, Evgeny Moskvichev, Olga Novitskaya, Evgenii Knyazhev, Yuliya Denisova, Andrei Leonov, Vladimir Denisov, Sergei Tarasov
Summary: Multilayer nitride coatings provide excellent performance in metalworking tool production. This study characterized vacuum-arc plasma-assisted deposited multilayer ZrN/CrN coatings with different numbers of layers for high-temperature oxidation. The results showed that coatings with more layers exhibited higher oxidation resistance, effectively preventing surface oxidation and deterioration.
Article
Optics
Haoran Li, Zeyong Wei, Jinlong Zhang, Xinbin Cheng, Zhanshan Wang
Summary: This study experimentally and theoretically investigated the abnormal scattering of nodular defects in high-reflection multilayer coatings. The results showed that the total scattering does not vary monotonically with increasing nodular structure size, but rather oscillates. Field distribution analysis revealed that the anomalous scattering originates from the coupling of the incident light with the surface wave at the top of the defects. These findings contribute to the development of low-scattering-loss multilayer coatings and high-precision optical systems.
Article
Multidisciplinary Sciences
Hirokatsu Yumoto, Takahisa Koyama, Akihiro Suzuki, Yasumasa Joti, Yoshiya Niida, Kensuke Tono, Yoshitaka Bessho, Makina Yabashi, Yoshinori Nishino, Haruhiko Ohashi
Summary: Researchers have achieved high resolution focusing and single-particle imaging of non-crystalline objects using precise multilayer mirrors. This technique provides higher fluence and unprecedented 2-nanometer resolution, enabling the exploration of the relationship between dynamic structures and functions of native biomolecular complexes.
NATURE COMMUNICATIONS
(2022)
Article
Materials Science, Coatings & Films
Saad M. Fayed, Dongxu Chen, Shengli Li, Yanwen Zhou, Hongbin Wang, M. M. Sadawy
Summary: In this research, multilayer DLC-Si films were successfully formed on the 2024 Al alloy using PECVD. Characterization techniques including SEM, AFM, Raman spectroscopy, XPS, FTIR, and Nano Indenter G200 were employed to analyze the microstructural features of the coatings. The results showed that increasing the bias voltage improved the condensation of the DLC layer, leading to thicker coatings. The anticorrosion performance of the DLC films was also investigated, demonstrating their effectiveness in preventing Cl- ion penetration.
SURFACE & COATINGS TECHNOLOGY
(2022)
Article
Optics
Zlatko Rek, Henry N. Chapman, Bozidar Sarler, Sasa Bajt
Summary: Numerical simulations show that it is possible to focus the full beam of a high fluence XFEL using Multilayer Laue lenses made from low atomic number materials. Thicker lenses are required for high diffraction efficiency, leading to lower absorption, reduced temperature increase, and improved dissipation of heat in the multilayer structure.
Article
Chemistry, Analytical
A. Scordo, V De Leo, C. Curceanu, M. Miliucci, F. Sirghi
Summary: This paper reports the reflection efficiency measurements of the VOXES Von Hamos spectrometer based on HAPG mosaic crystals and ray tracing simulation results. The results indicate the potential application value of the VH spectrometer in the field of Bragg spectrometers.
JOURNAL OF ANALYTICAL ATOMIC SPECTROMETRY
(2021)
Article
Astronomy & Astrophysics
B. Mondal, S. V. Vadawale, N. P. S. Mithun, C. S. Vaishnava, N. K. Tiwari, S. K. Goyal, S. S. Panini, V. Navalkar, C. Karmakar, M. R. Patel, R. B. Upadhyay
Summary: Multilayer X-ray mirrors consist of alternate layers of high Z and low Z materials with a typical thickness of 10-100 angstrom, enhancing reflectivity by allowing reflections at angles larger than the critical angle of X-ray reflection. By varying the thickness of the layers, it is possible to design mirrors with enhanced reflectivity over a broad energy range. The development of such mirrors requires appropriate software tools for design and characterization, such as the program DarpanX.
ASTRONOMY AND COMPUTING
(2021)
Article
Materials Science, Multidisciplinary
Dmitriy Zusin, Ezio Iacocca, Loic Le Guyader, Alexander H. Reid, William F. Schlotter, Tian-Min Liu, Daniel J. Higley, Giacomo Coslovich, Scott F. Wandel, Phoebe M. Tengdin, Sheena K. K. Patel, Anatoly Shabalin, Nelson Hua, Stjepan B. Hrkac, Hans T. Nembach, Justin M. Shaw, Sergio A. Montoya, Adam Blonsky, Christian Gentry, Mark A. Hoefer, Margaret M. Murnane, Henry C. Kapteyn, Eric E. Fullerton, Oleg Shpyrko, Hermann A. Durr, T. J. Silva
Summary: In this study, the laser-induced dynamics of labyrinth domain networks in ferromagnetic CoFe/Ni multilayers were investigated using ultrafast x-ray diffraction. It was observed that the amplitudes of the magnetic diffraction rings decreased to different degrees within a short period of time and the rings also broadened and contracted radially. By analyzing the diffraction rings using Fourier analysis, the broadening of the domain walls was quantitatively determined. These findings provide important evidence for understanding the dynamics of labyrinth domain structures under far-from-equilibrium conditions.
Article
Chemistry, Physical
Remi F. Andre, Gwenaelle Rousse, Capucine Sassoye, Maxim Avdeev, Benedikt Lassalle-Kaiser, Benoit Baptiste, Sophie Carenco
Summary: This article investigates the key compound of cerium oxide as a catalyst and identifies an intermediate phase of Ce-(IV) that forms in the presence of air. The crystal structure of this phase is proposed, and it is confirmed to be an observable intermediate in the synthesis of cerium dioxide.
CHEMISTRY OF MATERIALS
(2023)
Article
Physics, Applied
Mitsunori Toyoda, Ryo Yokoyama, Shuntaro Waki, Toshiyuki Kakudate, Jun Chen
Summary: This study investigated a new etching procedure for the complete removal of Mo/Si multilayer coatings, allowing valuable mirror substrates to be reused in extreme ultraviolet imaging. The results demonstrate that an alkaline solution containing potassium ferricyanide and sodium hydroxide can remove the entire coating within 60 minutes while maintaining the original surface figure.
APPLIED PHYSICS EXPRESS
(2021)
Article
Optics
Wei Xu, Weihe Xu, Nathalie Bouet, Juan Zhou, Hanfei Yan, Xiaojing Huang, Lei Huang, Ming Lu, Maxim Zalalutdinov, Yong S. Chu, Evgeny Nazaretski
Summary: We have developed a new machine-learning-based approach for automatically measuring small angles between multiple planar surfaces characterized by white light interferometers. This method utilizes an unsupervised clustering algorithm to identify the distinct surfaces in interferometer images and calculates the angles between them through surface fitting. The method simplifies the angle measurement procedure and has been successfully applied to the alignment of 2D Multilayer Laue Lenses (MLLs) for high-resolution x-ray microscopy, demonstrating its automatic, accurate, and robust small-angle measurement capabilities.
OPTICS AND LASERS IN ENGINEERING
(2023)
Article
Materials Science, Coatings & Films
Wolfgang Tillmann, Diego Grisales, Dominic Stangier, Carl-Arne Thomann, Joerg Debus, Alexander Nienhaus, Daniel Apel
Summary: This study deposited ternary nitrides with carbon atoms into tool steel using different techniques, and found that the introduction of carbon significantly reduced residual stresses. The compressive residual stresses in multilayer coatings increased with the addition of TiAlN interlayers, and the wear coefficients of HiPIMS coatings were notably lower than DCMS coatings.
SURFACE & COATINGS TECHNOLOGY
(2021)
