Dynamic analysis of an electrostatically actuated circular micro-plate interacting with compressible fluid

Title
Dynamic analysis of an electrostatically actuated circular micro-plate interacting with compressible fluid
Authors
Keywords
Free Vibration, Couple System, Circular Plate, Casimir Force, Saddle Node
Journal
ACTA MECHANICA
Volume 224, Issue 9, Pages 2025-2035
Publisher
Springer Nature
Online
2013-04-10
DOI
10.1007/s00707-013-0877-3

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