Structural and mechanical properties of Cr–Al–O–N thin films grown by cathodic arc deposition

Title
Structural and mechanical properties of Cr–Al–O–N thin films grown by cathodic arc deposition
Authors
Keywords
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Journal
ACTA MATERIALIA
Volume 60, Issue 19, Pages 6494-6507
Publisher
Elsevier BV
Online
2012-09-23
DOI
10.1016/j.actamat.2012.08.010

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