Fracture toughness of silicon nitride thin films of different thicknesses as measured by bulge tests

Published 2010 View Full Article

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Title
Fracture toughness of silicon nitride thin films of different thicknesses as measured by bulge tests
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 59, Issue 4, Pages 1772-1779
Publisher
Elsevier BV
Online
2010-12-16
DOI
10.1016/j.actamat.2010.11.043

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