Nanovoid formation by change in amorphous structure through the annealing of amorphous Al2O3 thin films

Published 2011 View Full Article

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Title
Nanovoid formation by change in amorphous structure through the annealing of amorphous Al2O3 thin films
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 59, Issue 11, Pages 4631-4640
Publisher
Elsevier BV
Online
2011-05-01
DOI
10.1016/j.actamat.2011.04.008

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