Surface and defect microstructure of GaN and AlN layers grown on hydrogen-etched 6H–SiC(0001) substrates

Published 2010 View Full Article

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Title
Surface and defect microstructure of GaN and AlN layers grown on hydrogen-etched 6H–SiC(0001) substrates
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 58, Issue 6, Pages 2165-2175
Publisher
Elsevier BV
Online
2010-01-19
DOI
10.1016/j.actamat.2009.12.002

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