Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique

Published 2009 View Full Article

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Title
Investigation of fracture properties of magnetron-sputtered TiN films by means of a FIB-based cantilever bending technique
Authors
Keywords
-
Journal
ACTA MATERIALIA
Volume 57, Issue 6, Pages 1768-1776
Publisher
Elsevier BV
Online
2009-01-24
DOI
10.1016/j.actamat.2008.12.018

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