Cyclic Block Copolymers for Controlling Feature Sizes in Block Copolymer Lithography

Published 2012 View Full Article

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Title
Cyclic Block Copolymers for Controlling Feature Sizes in Block Copolymer Lithography
Authors
Keywords
-
Journal
ACS Nano
Volume 6, Issue 12, Pages 10845-10854
Publisher
American Chemical Society (ACS)
Online
2012-11-30
DOI
10.1021/nn304217y

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