Profile Evolution for Conformal Atomic Layer Deposition over Nanotopography

Title
Profile Evolution for Conformal Atomic Layer Deposition over Nanotopography
Authors
Keywords
-
Journal
ACS Nano
Volume 4, Issue 8, Pages 4637-4644
Publisher
American Chemical Society (ACS)
Online
2010-07-22
DOI
10.1021/nn1009984

Ask authors/readers for more resources

Publish scientific posters with Peeref

Peeref publishes scientific posters from all research disciplines. Our Diamond Open Access policy means free access to content and no publication fees for authors.

Learn More

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started