Solution-Processable LaZrOx/SiO2 Gate Dielectric at Low Temperature of 180 °C for High-Performance Metal Oxide Field-Effect Transistors

Title
Solution-Processable LaZrOx/SiO2 Gate Dielectric at Low Temperature of 180 °C for High-Performance Metal Oxide Field-Effect Transistors
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 6, Issue 21, Pages 18693-18703
Publisher
American Chemical Society (ACS)
Online
2014-10-07
DOI
10.1021/am504231h

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