Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films

Published 2014 View Full Article

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Title
Plasma Processing for Crystallization and Densification of Atomic Layer Deposition BaTiO3 Thin Films
Authors
Keywords
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Journal
ACS Applied Materials & Interfaces
Volume 6, Issue 13, Pages 10656-10660
Publisher
American Chemical Society (ACS)
Online
2014-06-20
DOI
10.1021/am502298z

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