Highly Conducting, Transparent, and Flexible Indium Oxide Thin Film Prepared by Atomic Layer Deposition Using a New Liquid Precursor Et2InN(SiMe3)2

Published 2014 View Full Article

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Title
Highly Conducting, Transparent, and Flexible Indium Oxide Thin Film Prepared by Atomic Layer Deposition Using a New Liquid Precursor Et2InN(SiMe3)2
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 6, Issue 20, Pages 17481-17488
Publisher
American Chemical Society (ACS)
Online
2014-09-26
DOI
10.1021/am502085c

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