Double-Layer Imprint Lithography on Wafers and Foils from the Submicrometer to the Millimeter Scale

Published 2011 View Full Article

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Title
Double-Layer Imprint Lithography on Wafers and Foils from the Submicrometer to the Millimeter Scale
Authors
Keywords
-
Journal
ACS Applied Materials & Interfaces
Volume 3, Issue 4, Pages 1041-1048
Publisher
American Chemical Society (ACS)
Online
2011-03-11
DOI
10.1021/am101187n

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