Journal
IETE TECHNICAL REVIEW
Volume 33, Issue 1, Pages 82-87Publisher
TAYLOR & FRANCIS LTD
DOI: 10.1080/02564602.2015.1054903
Keywords
Aluminium gallium nitride; bow; Curvature; dislocation bending; Gallium nitride; HEMTs; Semiconductor growth; Stress control; Two dimensional electron gas
Funding
- Ministry of Defence, Government of India [TD-2008/SPL-147]
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An efficient buffer layer scheme has been designed to address the issue of curvature management during metalorganic chemical vapour deposition growth of GaN on Si (111) substrate. This is necessary to prevent cracking of the grown layer during post-growth cooling down from growth temperature to room temperature and to achieve an allowable bow (<40 m) in the wafer for carrying out lithographic processes. To meet both these ends simultaneously, the stress evolution in the buffer layers was observed carefully. The reduction in precursor flow during the buffer layer growth provided better control over curvature evolution in the growing buffer layers. This has enabled the growth of a suitable high electron mobility transistor (HEMT) stack on 2 Si (111) substrate of 300 m thickness with a bow as low as 11.4 m, having a two-dimensional electron gas (2DEG) of mobility, carrier concentration, and sheet resistance values 1510 cm(2)/V-s, 0.96 x 10(13)/cm(2), and 444 /, respectively. Another variation of similar technique resulted in a bow of 23.4 m with 2DEG mobility, carrier concentration, and sheet resistance values 1960 cm(2)/V-s, 0.98 x 10(13)/cm(2), and 325 /, respectively.
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