Precision Sinusoidal Local Scan for Large-Range Atomic Force Microscopy With Auxiliary Optical Microscopy

Title
Precision Sinusoidal Local Scan for Large-Range Atomic Force Microscopy With Auxiliary Optical Microscopy
Authors
Keywords
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Journal
IEEE-ASME TRANSACTIONS ON MECHATRONICS
Volume 20, Issue 1, Pages 226-236
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2014-04-12
DOI
10.1109/tmech.2014.2313351

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