Electrical Contacts in SOI MEMS Using Aerosol Jet Printing

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Title
Electrical Contacts in SOI MEMS Using Aerosol Jet Printing
Authors
Keywords
-
Journal
IEEE Journal of the Electron Devices Society
Volume 6, Issue -, Pages 34-40
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2017-10-21
DOI
10.1109/jeds.2017.2764498

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