Fabrication of high refractive index TiO2 films using electron beam evaporator for all dielectric metasurfaces

Published 2018 View Full Article

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Title
Fabrication of high refractive index TiO2 films using electron beam evaporator for all dielectric metasurfaces
Authors
Keywords
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Journal
Materials Research Express
Volume 5, Issue 1, Pages 016410
Publisher
IOP Publishing
Online
2018-01-12
DOI
10.1088/2053-1591/aaa280

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