Use of chemical oxidizers with alumina slurry in Double Disk Magnetic Abrasive Finishing for improving surface finish of Si (100)

Published 2018 View Full Article

Authors

Keywords

Double Disk Magnetic Abrasive Finishing (DDMAF), Flexible Magnetic Abrasive Brush (FMAB), Response Surface Methodology (RSM), Magnetic Abrasive Particles (MAPs), Fmincon

Journal

Journal of Manufacturing Processes

Volume 32, Issue -, Pages 138-150

Publisher

Elsevier BV

Online

2018-02-21

DOI

10.1016/j.jmapro.2018.02.007

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