Analyses on Cleanroom-Free Performance and Transistor Manufacturing Cycle Time of Minimal Fab

Title
Analyses on Cleanroom-Free Performance and Transistor Manufacturing Cycle Time of Minimal Fab
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 28, Issue 4, Pages 551-556
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2015-10-06
DOI
10.1109/tsm.2015.2487324

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